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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / HYDROGEN CHLORIDE

HCI
UN 1050

Description
Grade
Impurities
(Gas Phase)
Electronic
99.995% (N4.5)
(Mol. PPM)
VLSI
99.999% (N5.0)
(Mol. PPM)
Sigma 3
99.999% (N5.0)
(Mol. PPM)
Hydrogen Chloride is a pungent, toxic, corrosive
gas having a suffocating odour. It is heavier than air and fumes strongly in moist air.
Nitrogen < 16 < 2 < 2
Oxygen + Argon < 5 < 1 < 1
THC < 54 < 1 < 1
Carbon Dioxide < 10 < 8 < 5
Moisture < 10 < 3 < 2
CO - - < 1
Total Metals - < 10 ppmw < 0.5 ppmw
Iron (Fe) - - < 0.1 ppmw
Nickel (Ni) - - < 0.05 ppmw
Chromium (Cr) - - < 0.05 ppmw
Other Metals 1 - - < 0.01 ppmw
1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn

Cylinder Size Volume (Kg)   Cylinder Data
B44st (A) 27.3  

Supplied as a liquefied in seamless steel cylinders.

Standard sizes / Volumes as listed -
Smaller volumes are available on request.

B50st 37  

PROTON GAS can supply any internationally recognised valve type. For Hydrogen Chloride standard internationalvalve types are as follows
American CGA 330 / DISS 634
European DIN 477 - 8

Gas Data
Mol. Weight 36.461
Boiling Point -85°C
Density 1.5 g/cm3
Vapour Pressure 41.7 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.


Typical Applications

Etching of native oxide prior to epitaxial deposition : CVD reactor cleaning, moisture scavenger in CVD oxides.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option