Boron Trichloride Gas Valve, Liquefied Boron Chloride Supplier - Semiconductor Gases

PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / BORON TRICHLORIDE

BORON TRICHLORIDE
(Boron Chloride)

BCL₃
UN 1741

Description	Grade Impurities (Liquid Phase)	99.99% (N4.0) (Vol. PPM)	99.999% (N5.0) (Vol. PPM)
Boron Trichloride is a colourless gas, which fumes in the presence of moist air. It has a choking odour.	Nitrogen	< 40	< 2
	Oxygen	< 20	< 1
	Carbon Monoxide	< 20	< 0.2
	Carbon Dioxide	-	< 0.2
	Chlorine	< 5	< 0.2
	Phosgene	< 5	< 0.5
	Hydrogen chloride	-	< 1
	Mehtane	-	< 0.5

Metals Analysis N5.0 Grade only	Impurity	Intergas Spec. (PPM wt)	Impurity	Intergas Spec. (PPM wt)
	Ag	0.1	Cu	0.01
	Al	0.05	Fe	0.1
	As	0.03	K	0.05
	Ba	0.01	Li	0.01
	Bi	0.01	Mg	0.02
	Ca	0.02	Mn	0.01
	Cd	0.01	Na	0.1
	Co	0.01	Ni	0.01
	Cr	0.02	Pb	0.01
	Sb	0.01	Si	0.5
	Zn	0.05	-	-

Cylinder Size	Volume (Kg)		Cylinder Data
B10st	12		Supplied as a liquefied gas in seamless steel cylinders. Standard sizes / Volumes as listed - Larger volumes are available on request.
B44st (A)	50
B50st	60

PROTON GAS can supply any internationally recognised valve type. For Boron Trichloride the standard international valve types are as follows
American	CGA 660 / DISS 634
European	DIN 477 - 8

Gas Data
Mol. Weight	117.17
Boiling Point	12.4°C
Density	1.37 kg/m ³
Vapour Pressure	1.07 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.

Typical Applications

Common etch gas for thin film applications in Aluminium and Ploysilicon.

Pure & Carrier Gases

Speciality Gases

Hydrocarbon Refrigerants

Semiconductor Gases

Boron Trichloride

Carbon Monoxide

Hydrogen Bromide

Hydrogen Chloride

Hydrogen Sulphide

Silicon Terachloride

Sulphur Hexafluoride

Additional Gases

Lecture Bottles

Gas Mixtures / Calibration
Gas Mixtures

Refrigerant Gases

Gas Handling Equipments