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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / BORON TRICHLORIDE

BCL3
UN 1741

Description
Grade Impurities
(Liquid Phase)
99.99% (N4.0)
(Vol. PPM)
99.999% (N5.0)
(Vol. PPM)
Boron Trichloride is a colourless gas, which fumes in the presence of moist air.
It has a choking odour.
Nitrogen < 40 < 2
Oxygen < 20 < 1
Carbon Monoxide < 20 < 0.2
Carbon Dioxide - < 0.2
Chlorine < 5 < 0.2
Phosgene < 5 < 0.5
Hydrogen chloride - < 1
Mehtane - < 0.5

Metals
Analysis

N5.0 Grade only
Impurity Intergas Spec.
(PPM wt)
Impurity Intergas Spec.
(PPM wt)
Ag 0.1 Cu 0.01
Al 0.05 Fe 0.1
As 0.03 K 0.05
Ba 0.01 Li 0.01
Bi 0.01 Mg 0.02
Ca 0.02 Mn 0.01
Cd 0.01 Na 0.1
Co 0.01 Ni 0.01
Cr 0.02 Pb 0.01
Sb 0.01 Si 0.5
Zn 0.05 - -

Cylinder Size Volume (Kg)   Cylinder Data
B10st 12  

Supplied as a liquefied gas in seamless steel cylinders.

Standard sizes / Volumes as listed -
Larger volumes are available on request.

B44st (A) 50  
B50st 60  

PROTON GAS can supply any internationally recognised valve type. For Boron Trichloride the standard international valve types are as follows
American CGA 660 / DISS 634
European DIN 477 - 8

Gas Data
Mol. Weight 117.17
Boiling Point 12.4°C
Density 1.37 kg/m 3
Vapour Pressure 1.07 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.


Typical Applications

Common etch gas for thin film applications in Aluminium and Ploysilicon.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option