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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / SILANE

SiH4
UN 2203

Description
Grade Impurities
(Gas Phase)
99.999% (N5.0)
(excluding H2)
(Vol. PPM)
Silane is a colourless gas with a repulsive odour at room temperature and atmospheric pressure. In its pure state it is spontaneously combustible in air but is indefinitely stable in metal containers.

Metals anlysis data is available on request.
Hydrogen * 50
Nitrogen 1
Oxygen + Argon 1
Carbon Monioxide 0.2
Carbon Dioxide 0.2
Hydrogen 1
Moisture 0.1
THC as methane 0.2
Other H/C 0.5
Trichlorosilane 0.5
Dichlorosilane 0.5
Disilane 0.5
Resistivity > 10,000 ohm.com * <10 ppm in aluminium cylinders

Cylinder Size Volume (Kg) Pressure (Bar)   Cylinder Data
B10st up to 3 up to 165  

Supplied as a high pressure gas in seamless steel or aluminium cylinders.

Standard size / Volumes as Listed.
Larger volumes available on request.

B44st (A) up to 13.2 up to 165  
B50st / al up to 15 up to 165  

PROTON GAS can supply any internationally recognised valve type. For Silane the standard international valve types are as follows
American CGA 350 / DISS 632
European DIN 477 - 1

Gas Data
Atomic Weight 32.11
Boiling Point -111.5°C
Density 1.114 kg/cm3

Recommended Regulator

Single stage stainless steel body with stainless steel internals.

PROTON GAS has a variety of suitable handling equipment for this product - please enquire.


Typical Applications

Used as a source of high purity silicon in the electroincs industry for thin film deposits and the formation of high purity silicon oxides.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option