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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / PHOSPHINE

PH3
UN 2199

Description
Grade Impurities
(Gas Phase)
VLSI 99.9998% (N5.8)
(Vol. PPM)
Colourless, flammable, highly toxic gas with an odour of decaying fish. Argon + Oxygen < 1
Arsine < 1
Methane < 0.5
Carbon Monoxide < 0.5
Carbon Dioxide < 0.5
Moisture < 1
Nitrogen < 1

Cylinder Size Volume (Kg)   Cylinder Data
B44st (A) 12.3  

Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinder.

Standard sizes / Volumes as listed -
Smaller volumes are available on request.

B50st 13.9  

PROTON GAS can supply any internationally recognised valve type. For Phosphine the standard international
valve types are as follows
American CGA 350 / DISS 632
European DIN 477 - 1

Gas Data
Mol. Weight 33.997
Boiling Point -87.7°C
Density 1.40 kg/m 3
Vapour Pressure 41.9 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.


Typical Applications

Used as a dopant in metal / polysilicon dielectrics.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option