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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / CHLORINE

Cl2
UN 1962

Description
Grade Impurities
(Liquid phase)
Electronic
99.97% (N3.7)
(Mol. PPM)
VLSI
99.997% (N4.7)
(Mol. PPM)
Sigma 3
99.999% (N5.0)
(Mol. PPM)
Liquid chlorine is a clear amber-amber-coloured liquied and gaseous chlorine is a greenish yellow. It has a suffocating odour and irritates both the nose and throat. Nitrogen < 100 < 10 < 2
Oxygen < 10 < 2 < 1
THC < 5 < 0.2 < 1
Carbon Dioxide < 200 < 7 < 5
Moisture < 5 < 3 < 1
Carbon Monoxide - - < 1
Iron (Fe) - - < 0.5 ppmw
1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn

Cylinder Size Volume (Kg)   Cylinder Data
B44st (A) 45.5  

Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.

Standard sizes / Volumes as listed -
Larger volumes are available on request.

B50st 51.7  

PROTON GAS can supply any internationally recognised valve type. For Chlorine the standard international
valve types are as follows
American CGA 660 / DISS 728
European DIN 477 - 8

Gas Data
Mol. Weight 70.906
Boiling Point -34.05°C
Density 2.980 g/cm3
Vapour Pressure 5.8 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.


Typical Applications

Plasma etching of aluminium and other metal layers.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option