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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / SILCON TERACHLORIDE

SiCL4
UN 1818

Description
Grade Impurities
(Lquid Phase)
99.999% (N5.0)
(Vol. PPM)
At room temperature silicon Terachloride is a colourless, non flammable, corrosive liquid. Donors (P, As, Sb) < 3 ppba
Boron < 0.1 ppba
Aluminium < 0.003 ppba
Hydrocarbons < 0.1 ppmw
Carbon

< 0.3 ppma

Trichlorosilane < 100 ppmw

Cylinder Size Volume (Kg)   Cylinder Data
B10st up to 12  

Supplied as a liquefied gas in seamless steel cylinders.

Standard sizes / Volumes as listed -
Larger volumes are available on request.

B50st up to 60  

PROTON GAS can supply any internationally recognised valve type. For Tetrachloride the standard international
valve types are as follows
American CGA 330 / DISS 636
European DIN 477 - 8

Gas Data
Atomic Weight 169.9
Boiling Point 57.6°C
Density 1.483 kg/m 3
Vapour Pressure 0.2 bar

Recommended Regulator

PROTON GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.


Typical Applications

Used to plama etch metals and in epitaxial silicon applications.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option