Semiconductor Gases - Silicon Terachloride Liquefied Gas & Gas Valve Suppliers

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SILCON TERACHLORIDE

SiCL₄
UN 1818

Description	Grade Impurities (Lquid Phase)	99.999% (N5.0) (Vol. PPM)
At room temperature silicon Terachloride is a colourless, non flammable, corrosive liquid.	Donors (P, As, Sb)	< 3 ppba
	Boron	< 0.1 ppba
	Aluminium	< 0.003 ppba
	Hydrocarbons	< 0.1 ppmw
	Carbon	< 0.3 ppma
	Trichlorosilane	< 100 ppmw

Cylinder Size

Volume (Kg)

Cylinder Data

B10st

up to 12

Supplied as a liquefied gas in seamless steel cylinders.

Standard sizes / Volumes as listed -
Larger volumes are available on request.

B50st

up to 60

PROTON GAS can supply any internationally recognised valve type. For Tetrachloride the standard international valve types are as follows
American	CGA 330 / DISS 636
European	DIN 477 - 8