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PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / SULPHUR HEXAFLUORIDE

SF6
UN 1080

Description
Grade
Impurities
(Lquid Phase)
MEGA
99.998% (N4.8)
(Mol. PPM)
Electronic
99.999% (N5.0)
(Mol. PPM)
Sulphur Hexafluoride is a non-flammable, colourless, odourless gas. Nitrogen < 5 < 1
Oxygen < 5 < 0.5
Halocarbon 14 < 5 < 3
Moisture < 2 < 0.3
Hydrogen Flouride

< 0.1

< 0.1

Cylinder Size Volume (Kg)   Cylinder Data
B10st 10  

Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.

Standard sizes / Volumes as listed -
Larger volumes are available on request.

B44st (A) 45.8  
B50st 52  

PROTON GAS can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows
American CGA 590 / DISS 716
European DIN 477 - 6

Gas Data
Mol. Weight 146
Boiling Point -63.7°C
Density 0.736 kg/m 3
Boiling Point 21 bar

Recommended Regulator

Single stage brass or stainless steel body with stainless steel internals.

PROTON GAS
has a variety of suitable handling equipment for this product - please enquire.


Typical Applications

Used in the dry etching of films.

Bulk Gases
Pure & Carrier Gases
Rare Gases
Speciality Gases
Hydrocarbons
Hydrocarbon Refrigerants
Semiconductor Gases
Ammonia
Boron Trichloride
Carbon Monoxide
Chlorine
Deuterium
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulphide
Nitric Oxide
Nitrous Oxide
Phosphine
Silane
Silicon Terachloride
Sulphur Hexafluoride
Xenon
Additional Gases
Lecture Bottles
Gas Mixtures / Calibration
Gas Mixtures
Gas Handling Equipments

Packaging Option