Semiconductor Gases - Sulphur Hexafluoride Liquefied Gas & Gas Valve Suppliers

PRODUCTS / SPECIALITY GASES / SEMICONDUCTOR GASES / SULPHUR HEXAFLUORIDE

SULPHUR HEXAFLUORIDE

SF₆
UN 1080

Description	Grade Impurities (Lquid Phase)	MEGA 99.998% (N4.8) (Mol. PPM)	Electronic 99.999% (N5.0) (Mol. PPM)
Sulphur Hexafluoride is a non-flammable, colourless, odourless gas.	Nitrogen	< 5	< 1
	Oxygen	< 5	< 0.5
	Halocarbon 14	< 5	< 3
	Moisture	< 2	< 0.3
	Hydrogen Flouride	< 0.1	< 0.1

Cylinder Size	Volume (Kg)	Cylinder Data
B10st	10	Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders. Standard sizes / Volumes as listed - Larger volumes are available on request.
B44st (A)	45.8
B50st	52

PROTON GAS can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows
American	CGA 590 / DISS 716
European	DIN 477 - 6

Gas Data
Mol. Weight	146
Boiling Point	-63.7°C
Density	0.736 kg/m ³
Boiling Point	21 bar

Recommended Regulator

Single stage brass or stainless steel body with stainless steel internals.

PROTON GAS has a variety of suitable handling equipment for this product - please enquire.

Typical Applications

Used in the dry etching of films.

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